10-06-2017, 06:46 AM
Presented By:
S.G. Lokhre, P.R. Apte, R.Raajeev* and R. Lal*
Solid State Electronics Group
Tata Institute of Fundamental Research
Homi Bhabha Road
Colaba, BOMBAY - 400 005, India
ABSTRACT
Balanced doubly suspended structure has been used earlier for very precise high Q resonators. But here we have used the unbalanced half section which is sputter deposited with a magnetic film. The central axis acts like a torsion wire of about a micron width and thickness. The outer arm deflects downwards about the torsion axis when subjected to a magnetic field from beneath the sample. The deflection is measured by the reflected light presently under an optical microscope but can also be done by reflecting a laser beam as done in AFMs. The bending angle -versus- magnetic field is quite linear.
read full report
http://ee.iitb.ac apte/CV_PRA_MEMS_PAP5.htm