Introduction to Lithography for Nanometer VLSI Manufacturing


Optical Proximity Correction (OPC)
Optical proximity correction (OPC) is a photolithography enhancement techniques commonly used to compensate the mask pattern for image errors due to diffraction or process effects.

Design for Manufacturability (DFM)
A design methodologyincludes a set of techniquesto modify the design of ICs in order to improve:
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Abstract

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nanometer

ABSTRACT
A nanometer is one billionth of a meter. If you blew up a baseball to the size of the
earth, the atoms would become visible, about the size of grapes. Some 3- 4 atoms fit
lined up inside a nanometer. Nanotechnology is about building things atom by atom,
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