am getting this topic from iee jaurnals now i want to give technical seminor about this topic so help me to do presentation because am not getting proper information about this..

thrupthi s from
cit BE college
kodagu ....etc

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hi friend you can refer these pages to get the ppt on extreme ultraviolet lithography

http://seminarsprojects.net/Thread-extreme-ultraviolet-lithography-full-report?pid=11179#pid11179

http://seminarsprojects.net/Thread-extreme-ultraviolet-lithography-full-report?pid=14535#pid14535 ....etc

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to get iformation about the topic immersion lithography full report ppt and related topic refer the page link bellow

http://seminarsprojects.net/Thread-immersion-lithography

http://seminarsprojects.net/Thread-immersion-lithography-optical-lithography

http://seminarsprojects.net/Thread-nano-lithography-full-report ....etc

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hi pls i need types of lithography in vlsi fabrication.. ....etc

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Sir plz help for seminar on X-ray lithography. send me ppt on xray lithography ....etc

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Removel of material by using electron beam and electrical field.
ELECTRON BEAM MACHINING :
A high velocity stream of electrons is focused on the workpiece surface to remove material by melting and vaporization
Electron beam gun accelerates a stream of electrons to 3/4 c and focused through an electromagnetic lens
Kinetic energy of beam converted to thermal energy of extremely high density, melting or vaporizing material in a very localized area
EBM must be carried out in a vacuum
MATERIAL PROCESSING BY ELECTRON BEAM:
High in ....etc

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Extreme ultraviolet lithography (also known as EUV or EUVL) is the next generation lithography technology using extreme ultraviolet (EUV) wavelength, currently expected to be 13.5 nm. EUV is currently being developed for possible further use in conjunction with Immersion Lithography with a resolution step 32 nm, sometimes referred to as node 7 nm. Primary EUV tool manufacturer, ASML EUV projects with 5 nm node requires a higher numerical aperture than at present and multiple pattern to a greater extent than in immersion lithography 20 nm no ....etc

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this is my technical seminor topic so i need report and ppt for this ....etc

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Immersion Lithography

OPTICAL LITHOGRAPHY

The dramatic increase in performance and cost reduction in the electronics industry are attributable to innovations in the integrated circuit and packaging fabrication processes. ICs are made using Optical Lithography. The speed and performance of the chips, their associated packages, and, hence, the computer systems are dictated by the lithographic minimum printable size. Lithography, which replicates a pattern rapidly from chip to chip, wafer to wafer, or substrate to substrate, also determines ....etc

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