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Title: layout optimizations for double pattrning lithography
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Title: Immersion Lithography OPTICAL LITHOGRAPHY
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Immersion Lithography

OPTICAL LITHOGRAPHY

The dramatic increase in performance and cost reduction in the electronics industry are attributable to innovations in the integrated circuit and packaging fabrication processes. ICs are made using Optical Lithography. The speed and performance of the chips, their associated packages, and, hence, the computer systems are dictated by the lithographic minimum printable size. Lithography, which replicates a pattern rapidly from chip to chip, wafer to wafer, or substrate to substrate, also determines ....etc

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Title: extreme ultraviolet lithography ppt seminar
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Posted By: mbsahooo
Created at: Thursday 17th of August 2017 08:03:07 AM
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Extreme ultraviolet lithography (also known as EUV or EUVL) is the next generation lithography technology using extreme ultraviolet (EUV) wavelength, currently expected to be 13.5 nm. EUV is currently being developed for possible further use in conjunction with Immersion Lithography with a resolution step 32 nm, sometimes referred to as node 7 nm. Primary EUV tool manufacturer, ASML EUV projects with 5 nm node requires a higher numerical aperture than at present and multiple pattern to a greater extent than in immersion lithography 20 nm no ....etc

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Title: layout optimization for double patterning lithography
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Posted By: vajay1093
Created at: Thursday 17th of August 2017 05:20:13 AM
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Title: Laser Micro-Patterning by Means of Optical Fibers with Micro-grinded Lens End Faces
Page Link: Laser Micro-Patterning by Means of Optical Fibers with Micro-grinded Lens End Faces -
Posted By: vijay
Created at: Thursday 17th of August 2017 07:57:53 AM
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Laser Micro-Patterning by Means of Optical Fibers with Micro-grinded Lens End Faces



Introduction

Nano-patterning of polymer surface has found a wide range of applications including biotechnology, where holes in the size of hundreds nm can influence the growth and differentiation of relatively large living cells . Instead of the e-beam patterning technique used in the Ref. 1, we ap-plied direct writing by laser-light. In our previous papers , we have demonstrated that th ....etc

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