Extreme ultraviolet lithography (also known as EUV or EUVL) is the next generation lithography technology using extreme ultraviolet (EUV) wavelength, currently expected to be 13.5 nm. EUV is currently being developed for possible further use in conjunction with Immersion Lithography with a resolution step 32 nm, sometimes referred to as node 7 nm. Primary EUV tool manufacturer, ASML EUV projects with 5 nm node requires a higher numerical aperture than at present and multiple pattern to a greater extent than in immersion lithography 20 nm no ....etc

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ABSTRACT

Silicon has been the heart of the world's technology boom for nearly half a century. Each year, manufacturers bring out the next great computer chip that boosts computing power and allows our Personal Computers to do more than we imagined just a decade ago. The current technology used to make microprocessors, deep ultraviolet lithography will begin to reach its limit around 2005. At that time, chipmakers will have to look to other technologies to cram more transistors onto silicon to create powerful chips. Many ....etc

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INTRODUCTION
Microprocessors, also called computer chips, are made using a process called lithography. Specifically, deep-ultraviolet lithography is used to make the current breed of microchips and was most likely used to make the chip that is inside your computer.
Lithography is akin to photography in that it uses light to transfer images onto a substrate. Silicon is the traditional substrate used in chip making. To create the integrated circuit design that's on a microprocessor, light is directed onto a mask. A ....etc

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ABSTRACT

This paper discusses the basic concepts and current state of development of EUV lithography (EUVL), a relatively new form lithography that uses extreme ultraviolet (EUV) radiation with a wavelength in the range of 10 to 14 nanometer (nm) to carry out projection imaging. Currently, and for the last several decades, optical projection lithography has been the lithographic technique used in the high-volume manufacture of integrated circuits. It is widely anticipated that improvements in this technology will allow it to remain the sem ....etc

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Immersion Lithography

OPTICAL LITHOGRAPHY

The dramatic increase in performance and cost reduction in the electronics industry are attributable to innovations in the integrated circuit and packaging fabrication processes. ICs are made using Optical Lithography. The speed and performance of the chips, their associated packages, and, hence, the computer systems are dictated by the lithographic minimum printable size. Lithography, which replicates a pattern rapidly from chip to chip, wafer to wafer, or substrate to substrate, also determines ....etc

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