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Laser micro fabrication technologies on RF MEMS



INTRODUCTION

Radio Frequency Microelectromechanical Systems Switches (RF MEMS)
Lower insertion loss
High isolation
Greater linearity
Lower static power dissipation

RF MEMS Switch Structure

Substrate
Coplanar waveguide(CPW) signal line
Bridge
Electrode plate

Fabrication based on IC wet and dry etching technique

Fabrication Procedure

Oxidation of SiO2 and deposition of SiN on Si substrate
F ....etc

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On the macro scale, feedback control is routinely applied to improve performance and enable new tasks in complex and uncertain systems operating in noisy environments. Our lab has focused on applying feedback control ideas to systems on the micro scale. Here we show how control methods can improve existing performance in the UCLA lab-on-a-chip electrowetting system and can create entirely new capabilities in our 'micro fluidic tweezers' cell steering devices.In the Electro-Wetting-On-Dielectric (EWOD) system developed at UCLA by CJ Kim, a grid ....etc

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Laser Micro-Patterning by Means of Optical Fibers with Micro-grinded Lens End Faces



Introduction

Nano-patterning of polymer surface has found a wide range of applications including biotechnology, where holes in the size of hundreds nm can influence the growth and differentiation of relatively large living cells . Instead of the e-beam patterning technique used in the Ref. 1, we ap-plied direct writing by laser-light. In our previous papers , we have demonstrated that th ....etc

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Demand for the research and development of the micro-manufacturing technologies is being fueled by the ever-increasing trend towards miniaturization over a wide spectrum of disciplines and industries. Recent technological advancement in the defense, biomedical, telecom-munications, consumer electronics have spearheaded the need for micromanufacturing technology, which is now beginning to find application in the automotive and aerospace industries due to the economic potential of the micro-factory paradigm. Micro-scale mechanical manufacturing p ....etc

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Micro-electro Mechanical Systems (MEMS)

Introduction
The satellite industry could experience its biggest revolution since it joined the ranks of commerce, thanks to some of the smallest machines in existence. Researchers are performing experiments designed to convince the aerospace industry that microelectromechanical systems (MEMS) could open the door to low-cost, high-reliability, mass-produced satellites.MEMS combine conventional semiconductor electronics with beams, gears, levers, switches, accelerometers, diaphragms, microfluidic thrus ....etc

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There is a 700 page book, with 450 pictures called 'On a Cushion of Air', (available on Amazon or The Book Depository3ysen and Kindle), which tells the story of Christopher Cockerell's discovery that heavy weights could be supported on a cushion of low pressure air, and the development of the hovercraft by those who were there, from the very early days through to the heyday of the giant 165-ton SRN.4, which crossed the English Channel starting in 1968 carrying 30 cars and 254 passengers at speeds in excess of 75 knots on a calm day. It was subs ....etc

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A hovercraft or air-cushion vehicle (ACV) is a craft designed to travel over any smooth surface supported by a cushion of slow moving, high-pressure air, ejected downwards against the surface below, and contained within a skirt. Hovercraft are used throughout the world as a method of specialized transport wherever there is the need to travel over multiple types of surfaces. Because they are supported by a cushion of air, hovercraft are unique among all forms of ground transportation in their ability to travel equally well over land, ice, and ....etc

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